A novel self-sensing technique for tapping-mode atomic force microscopy
نویسندگان
چکیده
منابع مشابه
A novel self-sensing technique for tapping-mode atomic force microscopy.
This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection te...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2013
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4841855